Developing qubit fabrication process with high throughput and uniformity

Team Member

Name	Belong	Position
Hiroyuki Tsukamoto	1st Development Section, Element Development Department, Optical Division, Nikon Corporation	Section Manager
Hajime Aoyama	Business Planning Department, Semiconductor Lithography Business Unit, Nikon Corporation	Technical Expert
Naooki Saito	1st Development Section, Element Development Department, Optical Division, Nikon Corporation	Chief Researcher